Title:
MANUFACTURE OF SOLID-STATE IMAGE PICKUP ELEMENT
Document Type and Number:
Japanese Patent JPH04315474
Kind Code:
A
Abstract:
PURPOSE: To prevent the shade film of a charge transfer part in a solid-state image pickup element from thinning in the sidewall part of a charge transfer polysilicon electrode to lower the shading capability in that part.
CONSTITUTION: A shade film is obtained when tungsten silicide is sputtered twice, that is, a sidewall-shaped first shade layer 7a is formed in a polysilicon electrode 6 sidewall part for the first time and a second shade layer 8a for shading the whole substrate surface excepting a photoelectric transfer n-type semiconductor layer 2 is formed for the second time.
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Inventors:
MURATA NAOFUMI
MAEKAWA SHIGETO
MAEKAWA SHIGETO
Application Number:
JP10887491A
Publication Date:
November 06, 1992
Filing Date:
April 12, 1991
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L27/148; H01L27/14; H01L31/18; (IPC1-7): H01L27/14; H01L27/148; H01L31/18
Attorney, Agent or Firm:
Kenichi Hayase