To improve the uniformity of the density distribution of a matching layer formed by a matching member by uniformly filling hollow spherical bodies into the matching member made of a mixture comprising the hollow spherical bodies and a binding material without causing uneven distribution and to improve the sensitivity of an ultrasonic sensor employing the matching member.
The matching member with less density variations is produced by filling the hollow spherical bodies into a matching member producing tool through a combined excitation comprising: an excitation by longitudinal vibration caused by a natural drop of a stand 3 on which a matching member producing tool 2 is placed; and an excitation of lateral vibration by a lateral vibration excitation driver 10 to thereby apply shock and vibration to the hollow spherical bodies equal to and more than the friction coefficient among the hollow spherical bodies put in the matching member producing tool. Further, the ultrasonic sensor employing the matching layer produced from the matching member is provided.
Tomoyasu Sakaguchi
Hiroki Naito
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