To provide a manufacturing method of electron-emitting source with a triode structure which enables deposition of a carbon nano-tube precisely over a large area.
The manufacturing method comprises steps of: forming a cathode layer on a substrate, forming a dielectric layer on the cathode layer which has an opening section exposing the cathode layer to give the opening with a peripheral area, forming a gate layer on the dielectric layer excluding the peripheral area, forming a hydrophilic layer in the opening section, contacting the hydrophobic layer to both ends of the hydrophilic layer by forming a hydrophobic layer on the gate layer and the peripheral area, painting a carbon nano- tube solution on the hydrophilic layer using ink-jet printing, treating with heat, and eliminating the hydrophobic layer.
KA KAJU
CHO YUYO
TEI KAKI
RI SEICHU
