Title:
露光装置、投影光学系、デバイスの製造方法
Document Type and Number:
Japanese Patent JP4378109
Kind Code:
B2
Abstract:
The apparatus has an illumination optical system to illuminate a pattern on an object with light supplied from a semiconductor laser light source (1a). A projection optical system projects an image of the pattern onto a plate. A photosensor (4a) detects a positional offset of the pattern image. A mirror drive (6) inclines a mirror (M2), and moves the mirror by a minute amount in an optical-axis direction based on the offset. An independent claim is also included for a device fabrication method.
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Inventors:
Masayuki Suzuki
Application Number:
JP2003154908A
Publication Date:
December 02, 2009
Filing Date:
May 30, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G03F7/20; G03F9/00
Domestic Patent References:
| JP11345761A | ||||
| JP11233416A | ||||
| JP61034941A | ||||
| JP2002083767A | ||||
| JP1026101A | ||||
| JP11219900A | ||||
| JP2000286191A |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio