MANUFACTURING METHOD OF MULTILAYER CERAMIC SUBSTRATE WITH CAVITY

Title:

MANUFACTURING METHOD OF MULTILAYER CERAMIC SUBSTRATE WITH CAVITY

Document Type and Number:

Japanese Patent JP3876720

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To solve the problem that a cavity is deformed undesirably since contraction of relatively high degree is generated in a position far from an opening end of a cavity wherein a contraction control function by a contraction control layer is weakened when a multilayer ceramic with a cavity is manufactured by using a so-called non-contraction process.
SOLUTION: The radial dimension of a cavity 16 formed in a rare substrate laminated body 13 is made smaller as it gets far from an opening end 15 of the cavity 16. Consequently, the cavity 16 can provide a uniform radial dimension in a substrate laminated body 23 after being baked regardless of contraction of higher degree generated in a position far from the opening end 15 wherein a contraction control function by a contraction control layer 14 in baking process is weakened.

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Inventors:

Akiyoshi Moriyasu

Application Number:

JP2002019516A

Publication Date:

February 07, 2007

Filing Date:

January 29, 2002

Export Citation:

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Assignee:

MURATA MANUFACTURING CO.,LTD.

International Classes:

C04B35/64; H05K3/46; B28B11/00; H01L23/12; (IPC1-7): H05K3/46; B28B11/00; C04B35/64; H01L23/12

Domestic Patent References:

JP2001230548A
JP2001339161A
JP6224559A

Attorney, Agent or Firm:

Masaaki Koshiba

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