To provide a manufacturing method of a 3-dimensional nano structure using a mold and a nano material.
The manufacturing method of the nano-material comprises a process of forming the mold on a solid base by a lithography method, a process of forming a metal oxide thin film or an organic/metal oxide composite thin film on the formed mold, a process of forming a metal oxide nano structure or an organic/metal oxide compound nano structure by removing the formed mold. Otherwise, the manufacturing method comprises processes of forming: the mold on the solid base by the lithography method; forming a polymer thin film on the formed mold; a metal oxide thin film or an organic/metal oxide composite thin film on the formed polymer thin film; and a metal oxide nano structure or an organic/metal oxide composite nano structure by removing the formed polymer thin film or the mold, and polymer thin film.
KUNITAKE TOYOKI
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