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Title:
MANUFACTURING METHOD OF NANO MATERIAL, AND NANO MATERIAL
Document Type and Number:
Japanese Patent JP2004351608
Kind Code:
A
Abstract:

To provide a manufacturing method of a 3-dimensional nano structure using a mold and a nano material.

The manufacturing method of the nano-material comprises a process of forming the mold on a solid base by a lithography method, a process of forming a metal oxide thin film or an organic/metal oxide composite thin film on the formed mold, a process of forming a metal oxide nano structure or an organic/metal oxide compound nano structure by removing the formed mold. Otherwise, the manufacturing method comprises processes of forming: the mold on the solid base by the lithography method; forming a polymer thin film on the formed mold; a metal oxide thin film or an organic/metal oxide composite thin film on the formed polymer thin film; and a metal oxide nano structure or an organic/metal oxide composite nano structure by removing the formed polymer thin film or the mold, and polymer thin film.


Inventors:
FUJIKAWA SHIGENORI
KUNITAKE TOYOKI
Application Number:
JP2004032280A
Publication Date:
December 16, 2004
Filing Date:
February 09, 2004
Export Citation:
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Assignee:
RIKAGAKU KENKYUSHO
International Classes:
B82B3/00; B81C1/00; C01B33/12; C01G1/02; C01G23/04; C01G23/047; (IPC1-7): B82B3/00; B81C1/00; C01G23/047
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes