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Title:
STRUCTURE BODY OF STRUCTURE RELEASE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2004351607
Kind Code:
A
Abstract:

To provide a structure body of a structure release that can extremely reduce the time required for an structure etching operation, can increase the throughput of an optical interference type display, and is appropriate to an optical interference type display cell structure, and its manufacturing method.

The optical interference type display cell structure includes a first electrode, a second electrode, and at least one support body. The second electrode 301 has at least one hole 306 and is disposed substantially parallel with the first electrode. The support body is positioned between the first electrode and second electrode, and a cavity 312 is formed. An etching agent is injected through a hole 306, a sacrificial layer existing between the first and second electrodes is etched to form the cavity.


Inventors:
LIN WEN-JIAN
TSAI HSIUNG-KUANG
Application Number:
JP2004004236A
Publication Date:
December 16, 2004
Filing Date:
January 09, 2004
Export Citation:
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Assignee:
PRIME VIEW INT CO LTD
International Classes:
G02B26/02; B81B3/00; B81C1/00; G02B26/00; (IPC1-7): B81B3/00; B81C1/00; G02B26/02
Attorney, Agent or Firm:
Kiyoji Kuzuwa