MANUFACTURING METHOD FOR PYROELECTRIC TYPE INFRARED DETECTING ELEMENT

Japanese Patent JP3881657

B2

PROBLEM TO BE SOLVED: To provide a manufacturing method for a pyroelectric type infrared detecting element capable of patternizing finely an organic pyroelectric body excellent in reactivity to enhance detection sensitivity.
SOLUTION: In this manufacturing method for the pyroelectric type infrared detecting element wherein the first electrode 3 is formed on a substrate 1, and wherein the second electrode 5 is formed via the pyroelectric body 8, the pyroelectric body 8 is formed of an organic pyroelectic thin film 8a, a photoresist 11 is provided thereon to be patternized into an optional shape, the second electrode 5 is patternized into an optional shape by etching using the patternized photoresist 11, the photoresist 11 and the the organic pyroelectic thin film 8a are thereafter etchedly removed at the same time by oxide ion etching, using the patternized photoresist 11 and the second electrode 5 as etching masks, under the condition where the patternized photoresist 11 is left, so as to patternize the pyroelectric body 8 into an optional shape.

Kayo Ito
Kazuo Honda

JP2004011928A

February 14, 2007

January 20, 2004

Click for automatic bibliography generation  

Fukushima Prefecture

G01J1/02; G01J5/02; G01J5/34; H01L37/02; (IPC1-7): G01J1/02; G01J5/02; H01L37/02

JP2001267645A
JP5335632A

平成13年度 福島県ハイテクプラザ試験研究報告,2002年,p.37~40
福島県ハイテクプラザ研究報告書,2005年 3月,p.9~12
平成14年度 福島県ハイテクプラザ試験研究報告,2002年,p.19~22
平成12年度 福島県ハイテクプラザ試験研究報告,2000年,p.34~37

Katsuro Yoshikawa

Previous Patent: JIB TUMBLE PREVENTIVE DEVICE OF JIB CRANE

Next Patent: RELAY MEMBER AND MULTICHIP PACKAGE USING RELAY MEMBER