Title:
半導体装置の作製方法
Document Type and Number:
Japanese Patent JP4712208
Kind Code:
B2
Abstract:
A highly reliable semiconductor display device is provided. The semiconductor display device has a channel forming region, an LDD region, and a source region and a drain region in a semiconductor layer, and the LDD region overlaps with a first gate electrode, sandwiching a gate insulating film.
Inventors:
Shunpei Yamazaki
Jun Koyama
Hideomi Suzawa
Yukiharu Ono
Tatsuya Arao
Jun Koyama
Hideomi Suzawa
Yukiharu Ono
Tatsuya Arao
Application Number:
JP2001079623A
Publication Date:
June 29, 2011
Filing Date:
March 21, 2001
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
G02F1/1368; H01L21/336; G02F1/136; H01L29/786; G02F1/1362
Domestic Patent References:
| JP9055508A | ||||
| JP7086609A | ||||
| JP8064838A | ||||
| JP2000058847A | ||||
| JP8274336A | ||||
| JP11177105A |