To provide a method of manufacturing a solar cell of high efficiency which improves its productivity.
This manufacturing method is carried out in a manner, where a phosphorus junction layer 2 provided with an N++ part heavily doped with phosphorus on its surface is formed on a P-type silicon substrate 1, a surface electrode 6 is formed on the N++ part 3, and a back face electrode 7 is formed on the rear of the P-type silicon substrate 1. The phosphorus junction layer 2 is formed in a manner, where a phosphorus-containing organic silica compound paste 15 is printed on the P-type silicon substrate 1 corresponding to the pattern of the surface electrode 6, and the P-type silicon substrate 1 is subjected to gaseous phosphorus diffusion thermal treatment, whereby the phosphorus junction layer 2 provided with the N++ part 3 on its surface is formed.
TOKUNAGA KATSUSHI
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