Title:
熱型光検出器、熱型光検出装置、電子機器および熱型光検出器の製造方法
Document Type and Number:
Japanese Patent JP5707930
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve the detection sensitivity of a thermal photodetector.SOLUTION: A thermal photodetector comprises: a substrate 10; a support member 215 supported via a cavity 102 by the substrate; a heat detection element 230 supported by the support member; a heat transfer member 260 that is connected to the heat detection element by a connection part CN and has a heat-collecting part FL having an area larger than that of the connection part in a plan view and formed on the heat detection element 230; a first light absorption layer 270 that is formed between the heat transfer member 260 and the heat detection element 230 and contacting the heat transfer member 260; and a second light absorption layer 272 that is formed on the heat transfer member 260 and contacting the heat transfer member 260.
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Inventors:
Yasushi Tsuchiya
Application Number:
JP2010286334A
Publication Date:
April 30, 2015
Filing Date:
December 22, 2010
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02; H01L27/144; H01L37/02; H04N5/33
Domestic Patent References:
| JP2003065842A |
Attorney, Agent or Firm:
Inoue Ichi
Takekoshi Noboru
Yasushi Kuroda
Takekoshi Noboru
Yasushi Kuroda