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Patent Searching and Data


Title:
MASK HOLDER
Document Type and Number:
Japanese Patent JPS61294443
Kind Code:
A
Abstract:

PURPOSE: To assure stable operation and inexpensive production by moving a permanent magnet to change the magnetic force on the joint surfaces of a holder and magnetic material thereby attracting or detaching a mask.

CONSTITUTION: A solenoid coil 3 is impulsively excited by a DC power source via lead wires 7 while the mask 1 is brought near to the same. The permanent magnet 4 is preliminarily magnetized so as to move downward by repulsing from the magnetic field of the coil 3 when a driving pulse 8 is inputted to the coil 3. The magnet 4 is therefore moved by the input of the pulse 8 in any position where the permanent magnet exists and thereafter a closed magnetic path consisting of the magnet 4, a yoke 2 and the magnetic material of the mask 1 is formed and the mask 1 is kept attracted by the magnetic field of the magnet 4. A driving pulse 9 is inputted to excite the coil 3 in the case of detaching the mask 1 from the holder. The holder is thus stably operated to surely hold the mask and is inexpensively produced.


Inventors:
KARIYA TAKUO
Application Number:
JP13594485A
Publication Date:
December 25, 1986
Filing Date:
June 24, 1985
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/30; G03F1/00; G03F1/66; G03F7/20; H01L21/027; (IPC1-7): G03F1/00; H01L21/30
Attorney, Agent or Firm:
Tatsuo Ito