Title:
質量分析装置および質量分析方法
Document Type and Number:
Japanese Patent JP6976445
Kind Code:
B2
Abstract:
An object of the invention is to provide a mass spectrometry apparatus capable of obtaining a highly accurate quantitative result and being low-cost. A small section measurement instruction unit 101 instructs a detector 9 to perform measurement on a plurality of small sections 5 in a channel 4, the signals detected by the detector 9 are stored in a data storage unit 102, the signals are integrated by a small section signal amount integration unit 103, and variance of the integrated signals is calculated by a signal variance calculation unit 104. A signal variance evaluation unit 105 evaluates the signal variance of signals of each small section 5 in the same channel 4. When the signal variance is evaluated to be stable, an operation control unit 106 controls operations of the ion source 6 to continue measurement without warning. When the signal variance is evaluated to be unstable, the warning is performed during the measurement or after the measurement.
Inventors:
Yuichiro Hashimoto
Application Number:
JP2020536445A
Publication Date:
December 08, 2021
Filing Date:
July 24, 2019
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01J49/26; G01N27/62; H01J49/00; H01J49/04
Domestic Patent References:
| JP2012199027A |
Attorney, Agent or Firm:
Kaichi International Patent Office
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