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Patent Searching and Data


Title:
MEASURING APPARATUS FOR MEASURING TRANSMITTANCE OF COATING
Document Type and Number:
Japanese Patent JP3904569
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To automatically acquire essential optical characteristics of a coating, rather than by testing a sample.
SOLUTION: A measuring apparatus measures the transmittance of the coating on a glass plate. The glass plate is placed on a support and is shifted relative to the support. The support is provided with a gap, enabling optical beam to pass through the glass plate and impinge on a light receiving unit. The transmittance of the coating is determined in this way. The measuring apparatus can measure both reflection and electrical resistance of the coating.


Inventors:
Jürgen Schroeder
Application Number:
JP2004238977A
Publication Date:
April 11, 2007
Filing Date:
August 19, 2004
Export Citation:
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Assignee:
APPLIED MATERIALS GMBH & CO. KG
International Classes:
G01B7/06; G01N21/59; C23C14/54; G01B11/06; G01B11/28; G01M11/02; G01N21/55; G01N21/84; G01N21/958; (IPC1-7): G01N21/59; G01N21/55; //G01B7/06; G01B11/06
Domestic Patent References:
JP200262115A
JP2005338047A
JP2523660B2
JP2771208B2
JP2000114208A
JP3167449A
JP2001272339A
JP2000266637A
JP11352449A
JP8334473A
JP5172753A
JP627707B2
JP9210645A
JP2006513117A
Foreign References:
DE4127701A1
US6194701
DE1195135B
DE4201274A1
Attorney, Agent or Firm:
Hiroo Suzuki