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Title:
MEASURING DEVICE FOR DEGREE OF VACUUM IN TURBO MOLECULAR PUMP
Document Type and Number:
Japanese Patent JPS63176694
Kind Code:
A
Abstract:

PURPOSE: To eliminate the necessity for providing a vacuum gage, by obtaining a degree of vacuum in a turbo molecular pump from a phase difference between a current and voltage in an induction motor, which drives a rotor, to be displayed.

CONSTITUTION: Voltage is taken out from optional two phases of an induction motor 10 which drives a rotor of a turbo molecular pump, and one of the phase voltage is input to a phase comparator 14. While the other one is input as the current to the phase comparator 14 through a current/voltage converter 16, and a phase difference between the current and the preceding voltage is obtained. An amplifier 18 obtains voltage, corresponding to a degree of vacuum in the turbo molecular pump, from a phase difference signal to be displayed in a display device 20. Accordingly, the necessity for separately providing a vacuum gage is eliminated.


Inventors:
ISHIZAWA TADAO
SAITO TOSHIYA
Application Number:
JP699687A
Publication Date:
July 20, 1988
Filing Date:
January 14, 1987
Export Citation:
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Assignee:
SEIKO SEIKI KK
International Classes:
F04D19/04; G01L21/00; (IPC1-7): F04D19/04; G01L21/00
Attorney, Agent or Firm:
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