MEASURING DEVICE

Japanese Patent JP2014145684

A

PROBLEM TO BE SOLVED: To provide an advantageous effect on measuring a test surface having various shapes with high accuracy.SOLUTION: The measuring device measures a shape of the test surface by irradiating the test surface with light and detecting an interference signal between a test light reflected by a portion on the test surface into which light vertically enters and reference light. The measuring device includes: a light receiving part 190 for receiving the interference signal; an optical element 120 arranged on an optical path of the test light and making a route of the test light shit in parallel to a first direction orthogonal to the route according to an attitude on the optical element 120; a changing part 121 for changing the attitude of the optical element 120; and a control part 200. The control part 200 controls a changing part 121 and changes the attitude of the optical element 120 so that test light 162 enters a target range of the light receiving part, and determines position information indicating a location of the portion and inclination information indicating an inclination of the portion based on an amount by which the route of the test light 162 is shifted by the optical element 120 and the interference signal, and measures the shape of the test surface using the position information and the inclination information.

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OGATA TOSHIHIRO

JP2013014830A

August 14, 2014

January 29, 2013

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CANON KK

G01B11/24; G01B9/02

Yasunari Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Hideji Kimura
Shimoyama 治
Yukimitsu Nagagawa

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