Title:
MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2018112217
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To reduce vibration that affects measurement, with a simple mechanism.SOLUTION: A measuring device (1) comprises: a measuring apparatus (10) including a table (20) on which work (W) to be measured is placed, a microscope (61) that measures the work placed on the table, from above, moving means (30) that moves the table in X, Y, and Z directions, and a base (11) on which the microscope and the moving means are arranged; and vibration isolation means 70 that eliminates a frequency band of vibration that affects measurement of the measuring apparatus. The vibration isolation means comprises a frame (74) that covers the measuring apparatus, and four hanging parts (75) that hang the measuring apparatus from the frame at four places in a radial direction with a center of gravity of the measuring apparatus as a center. The hanging parts comprises springs (75a).SELECTED DRAWING: Figure 1
Inventors:
ITO YUSAKU
Application Number:
JP2017001787A
Publication Date:
July 19, 2018
Filing Date:
January 10, 2017
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
F16F15/067
Domestic Patent References:
| JP2009071273A | 2009-04-02 | |||
| JP2016075375A | 2016-05-12 | |||
| JPS4626700Y1 | ||||
| JPH1062139A | 1998-03-06 | |||
| JPS5977640U | 1984-05-25 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki
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