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Patent Searching and Data


Title:
MEASURING DEVICE
Document Type and Number:
Japanese Patent JPS62255856
Kind Code:
A
Abstract:

PURPOSE: To satisfactorily visualize an observation object with an ultraviolet light by a simple constitution, by forming the observation object using a fluorescent substance which converts an incident ultraviolet laser light to a visible light.

CONSTITUTION: An ultraviolet laser 12 is radiated to a substrate 18 by a laser light source 10, and when a laser point is formed on the substrate 18, a fluorescence 22 is radiated from a fluorescent substance which has been provided on the substrate 18. The fluorescence 22 which has been emitted from this substrate 18 transmits through an objective lens 16, and a dichroic mirror 14, and on the other hand, reflected by a half mirror 24, and made incident on a photoelectric detector 30 through a lens 26. In this case, a switching mirror 28 is withdrawn from in an optical path as shown by a broken line, and the fluorescence, on the other hand, is reflected by a mirror 34 through a lens 32. In this way, by a photoelectrically converted signal from the detector 30 and a fluorescent image on an image pickup surface 36, a position of a laser spot can be measured satisfactorily without observing directly a laser spot.


Inventors:
KATO KINYA
HAMASHIMA MUNEKI
Application Number:
JP9692186A
Publication Date:
November 07, 1987
Filing Date:
April 28, 1986
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B11/00; G01N21/64; G01N21/88; G01N21/91; G01N21/956; G02B27/50; G03F1/00; G03F1/84; H05K3/00; (IPC1-7): G01B11/00; G01N21/64; G01N21/88; G01N21/91; G02B27/50; G03F1/00; H05K3/00
Attorney, Agent or Firm:
Masatoshi Sato