Title:
MEASURING METHOD FOR BEVELING BENCH FLATNESS
Document Type and Number:
Japanese Patent JP2014231141
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method which enables the monitoring of a flatness of a beveling bench to display the result thereof as a quantized result.SOLUTION: A measuring method for a beveling bench flatness is provided which is characterized by comprising the steps of: positioning a substrate 10 on a beveling bench 30; beveling an end edge of the substrate 10 by a plurality of times while varying each of relative heights of a beveling wheel 20 to the substrate; locating a symmetry beveling points with upper-lower lower symmetrical beveling to match the relative heights of the beveling wheel 20 at that time with the symmetry beveling points; and acquiring a flatness of the beveling bench 30 from the relative heights of the beveling wheel 20 matched with the symmetry beveling points.
Inventors:
HAN MYEONG BO
Application Number:
JP2014108690A
Publication Date:
December 11, 2014
Filing Date:
May 27, 2014
Export Citation:
Assignee:
CORNING PREC MATERIALS CO LTD
International Classes:
B24B9/00; B24B41/06
Domestic Patent References:
| JP2000202749A | 2000-07-25 | |||
| JP2006026845A | 2006-02-02 | |||
| JPH08243891A | 1996-09-24 | |||
| JPH11165247A | 1999-06-22 | |||
| JP2007223005A | 2007-09-06 |
Attorney, Agent or Firm:
Nobuyuki Matsunaga
Crossing Tetsuji
Crossing Tetsuji
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