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Patent Searching and Data


Title:
MEASURING METHOD FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH02290039
Kind Code:
A
Abstract:

PURPOSE: To make it possible to conduct a measurement equal to that after package sealing by a method wherein the surface of a semiconductor device is coated with a dielectric film having a specific dielectric constant.

CONSTITUTION: When the photoresist layer 20, which is used to form an aperture part 22 on an insulating layer 16 and a passivation layer 18, is left on a semiconductor substrate 10 in the state as it is, the surface of the semiconductor integrated device is coated with a dielectric film having the dielectric constant of 1 or higher. As a result semiconductor chip is closely resembled to the capacitance between conductive leads in the state after the semiconductor chip is subjected to package-sealing, and an electric measurement equal to the state after package-sealed can be conducted in the substrate state.


Inventors:
KOKUGI SHINICHI
OZAWA MASAHIDE
Application Number:
JP16019189A
Publication Date:
November 29, 1990
Filing Date:
June 21, 1989
Export Citation:
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Assignee:
NEC CORP
International Classes:
G01R31/28; G01R31/316; H01L21/66; H01L21/822; G01R31/26; H01L27/04; (IPC1-7): G01R31/26; H01L21/66; H01L27/04
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)