Title:
ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP3136847
Kind Code:
B2
Abstract:
PURPOSE: To provide an acceleration sensor provided with a detection element composed of piezoelectric ceramic sheets which are bonded firmly without using an adhesive.
CONSTITUTION: An acceleration sensor is provided with a bimorph-type detection element 1 formed in such a way that one pair of polarized piezoelectric ceramic sheets 4 in which electrodes 2, 3 are formed on main faces are opposedly bonded. In the acceleration sensor, the bimorph-type detection element 2 is manufactured in such a way that one pair of piezoelectric ceramic green sheets 5 in which electrode patterns 6, 7 are printed on main surfaces are overlapped, the green sheets are pressurized along their thickness direction and baked, and a polarization treatment is executed to each sheet of the ceramic laminated body which is obtained by baking.
Inventors:
Jun Tabota
Application Number:
JP17301893A
Publication Date:
February 19, 2001
Filing Date:
July 13, 1993
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01P15/09; H01L41/08; (IPC1-7): G01P15/09; H01L41/08
Domestic Patent References:
| JP61269072A | ||||
| JP55749A | ||||
| JP430479U | ||||
| JP41455U |
Attorney, Agent or Firm:
Kazuhide Okada