Title:
MEMS ELEMENT, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2015074034
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a structure of an MEMS element in which breakage of a film is prevented while sensitivity of the MEMS element is enhanced.SOLUTION: In an MEMS element in which a stationary electrode 16 and a movable electrode 13 are arranged as facing each other with sandwiching a spacer on a substrate provided with a back chamber 21, a stopper structure 20 is provided in the back chamber in which the movable electrode is exposed. The stopper structure, when the movable electrode receives wind pressure and is displaced to the back chamber side, contacts to the movable electrode before resulting in breakage and prevents further displacement, resulting in preventing breakage of the movable electrode.
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Inventors:
OKADA HIROKI
Application Number:
JP2013209904A
Publication Date:
April 20, 2015
Filing Date:
October 07, 2013
Export Citation:
Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
B81B3/00; B81C1/00; H04R19/04; H04R31/00
Domestic Patent References:
| JPWO2009104389A1 | 2011-06-16 | |||
| JP2003130702A | 2003-05-08 | |||
| JP2013168810A | 2013-08-29 | |||
| JP2009153203A | 2009-07-09 | |||
| JP2011239324A | 2011-11-24 |
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