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Title:
METAL POLISHING LIQUID, AND CHEMICAL MECHANICAL POLISHING METHOD
Document Type and Number:
Japanese Patent JP2009212473
Kind Code:
A
Abstract:

To provide a metal polishing liquid capable of compatibly performing a high polishing speed and low dishing when polishing a polished object (wafer) with the metal polishing liquid used for chemical mechanical polishing (CMP) in a semiconductor device manufacturing process and a chemical mechanical polishing method using the same.

The metal polishing liquid for chemical mechanical polishing in the semiconductor device manufacture includes a compound 1 expressed by formula (1): herein R1 to R5 independently represent a hydrogen atom, a halogen atom, an aliphatic hydrocarbon group, an aryl group, a heterocyclic group, -COR6, -CO2R7, -CONR8R9, -CN, -OR10, -NR11R12, -SO3R13, or -SO2NR14R15, respectively. R6 to R15 independently represent a hydrogen atom, an aliphatic hydrocarbon group, an aryl group, a heterocyclic group, an acyl group, or an alkyl or arylsulfonyl group, respectively. R1 and R2, R2 and R3, R3 and R4, and R4 and R5 may be mutually coupled to form a cycle.


Inventors:
YOSHIKAWA SUSUMU
INABA TADASHI
Application Number:
JP2008056766A
Publication Date:
September 17, 2009
Filing Date:
March 06, 2008
Export Citation:
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Assignee:
FUJIFILM CORP
International Classes:
H01L21/304; B24B37/00; C09K3/14
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa