To provide a radiation-sensitive resin composition which does not cause pattern sidewall swelling, pattern collapse, etc., in a development process, and to provide a (meth)acrylic acid polymer usable in the composition.
The (meth)acrylic acid polymer is controlled in its solubility in an alkaline solution by the action of an acid and has a specific structure having repeating units each having an ether group. Furthermore, the polymer optionally contains repeating units each having, at the side chain, an alcoholic hydroxyl group having a fluorine atom or having a fluoromethyl group at least at the α position and/or repeating units having a lactone ring at its side chain. The radiation-sensitive resin composition includes the (meth)acrylic acid polymer.
CHIBA TAKASHI
JP2005234449A | 2005-09-02 | |||
JP2001302728A | 2001-10-31 | |||
JP2002220416A | 2002-08-09 | |||
JP2003177539A | 2003-06-27 | |||
JPH0892161A | 1996-04-09 | |||
JP2005234449A | 2005-09-02 | |||
JP2001302728A | 2001-10-31 | |||
JP2002220416A | 2002-08-09 | |||
JP2003177539A | 2003-06-27 |
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