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Title:
(METH)ACRYLIC ACID POLYMER AND RADIATION-SENSITIVE RESIN COMPOSITION
Document Type and Number:
Japanese Patent JP2010270333
Kind Code:
A
Abstract:

To provide a radiation-sensitive resin composition which does not cause pattern sidewall swelling, pattern collapse, etc., in a development process, and to provide a (meth)acrylic acid polymer usable in the composition.

The (meth)acrylic acid polymer is controlled in its solubility in an alkaline solution by the action of an acid and has a specific structure having repeating units each having an ether group. Furthermore, the polymer optionally contains repeating units each having, at the side chain, an alcoholic hydroxyl group having a fluorine atom or having a fluoromethyl group at least at the α position and/or repeating units having a lactone ring at its side chain. The radiation-sensitive resin composition includes the (meth)acrylic acid polymer.


Inventors:
NISHIMURA YUKIO
CHIBA TAKASHI
Application Number:
JP2010130591A
Publication Date:
December 02, 2010
Filing Date:
June 08, 2010
Export Citation:
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Assignee:
JSR CORP
International Classes:
C08F20/28; G03F7/039; H01L21/027
Domestic Patent References:
JP2005234449A2005-09-02
JP2001302728A2001-10-31
JP2002220416A2002-08-09
JP2003177539A2003-06-27
JPH0892161A1996-04-09
JP2005234449A2005-09-02
JP2001302728A2001-10-31
JP2002220416A2002-08-09
JP2003177539A2003-06-27
Attorney, Agent or Firm:
Wake Manipulation