Title:
レジスト用含フッ素重合体の製造方法
Document Type and Number:
Japanese Patent JPWO2004024787
Kind Code:
A
Inventors:
Toshiro Itani
Takamitsu Furukawa
Tamio Yamazaki
Takuji Ishikawa
Takayuki Araki
Quantity 明天
Chokai Fruit
Takamitsu Furukawa
Tamio Yamazaki
Takuji Ishikawa
Takayuki Araki
Quantity 明天
Chokai Fruit
Application Number:
JP2003011605W
Publication Date:
March 25, 2004
Filing Date:
September 11, 2003
Export Citation:
Assignee:
Daikin Industries, LTD.
Semiconductor Leading Edge Technologies, Inc.
Semiconductor Leading Edge Technologies, Inc.
International Classes:
C08F214/18; G03F7/039; G03F7/033; H01L21/027
Attorney, Agent or Firm:
朝日奈 宗太
秋山 文男
秋山 文男