Title:
METHOD OF ACQUIRING PHASE OF OPTICAL SYSTEM AND METHOD OF EVALUATING OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JP2018021891
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To efficiently acquire the phase distribution of light which is useful when evaluating an optical system including a case where defects such as a shape error of a refractive or reflection surface of each individual image-formation optical element or eccentricity, surface interval error, inclination and other assembly errors, in addition to design aberration, internally exist in an actually existing image-formation optical system.SOLUTION: An interference figure made to occur by superposing, on an output beam when an optical system is illuminated by an illumination beam emitted from each of a plurality of input image points, a reference beam coherent therewith is imaged to acquire interference figure data that collectively includes information about interference figures relating to all of input image points, and phase distribution relating to only a light emitted from a single input image point at a position where a beam recomposed for each of output beams is separated into respective beams is acquired by performing a diffractive optical propagation simulation, and acquisition of phase distribution at an exit pupil surface is made for each input image point by performing a diffractive optical propagation simulation.SELECTED DRAWING: Figure 1
Inventors:
OKAMOTO MASASHI
MATSUO TSUKASA
MATSUO TSUKASA
Application Number:
JP2017029097A
Publication Date:
February 08, 2018
Filing Date:
February 20, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC
International Classes:
G01J9/02; G01M11/00; G01M11/02; G03H1/04; G03H1/08
Attorney, Agent or Firm:
Masaki Harada