To clean and dry electronic parts and precision machinery parts and a resin container housing these parts for conveying and storing in a short time, make a whole cleaning and drying apparatus compact and remarkably reduce cleaning and drying time compared with conventional methods.
In a drying process for electronic parts and precision machinery parts after cleaning, the drying by draining and dehydration is conducted by introducing air with rotating shock waves at the intake side and suctioning air at the exhaust side and by uniformly irradiating a housing container with shock waves which are diffused from an air jet nozzle with rotating wave motion after cleaning the housing container, and the housing container conducts cleaning and drying these parts in a shorter time than in the past.