Title:
METHOD AND APPARATUS FOR COLLECTION OF PARTICLE
Document Type and Number:
Japanese Patent JP3731656
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a particle collecting and analytical method in which particles stuck to a component requiring a clean degree such as a hard disk drive or the like are collected in their dry state so as to be analyzed with satisfactory efficiency and to provide a particle collecting apparatus.
SOLUTION: In the particle collecting method, the particles present in a liquid are collected in their dry state when an analytical technique used to suck the particles collected on a filter is used. The liquid containing the particles housed in a container is sprayed, clean air used to dry the sprayed liquid is supplied, and the particles are centrifugally separated from the clean air so as to be collected on the filter and elementally analyzed.
Inventors:
Cyber Kong
Motoo Iwasaki
Motoo Iwasaki
Application Number:
JP2002113823A
Publication Date:
January 05, 2006
Filing Date:
April 16, 2002
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01N1/02; G01N15/00; G01N1/28; (IPC1-7): G01N1/02; G01N1/28; G01N15/00
Domestic Patent References:
| JP6130007A | ||||
| JP11083694A | ||||
| JP7294393A | ||||
| JP63501448A |