Title:
METHOD AND APPARATUS FOR DETECTION OF FLAW
Document Type and Number:
Japanese Patent JP3013693
Kind Code:
B2
Abstract:
PURPOSE: To precisely judge the quality of an object to be inspected without a pattern or having a repeated pattern by detecting defects of which lightness difference is very small.
CONSTITUTION: In a tracking-data creation process, the mean value (the average lightness) in a m-th column [where (m) represents a natural number of M or lower] of lightness distribution data by M-columns and N-rows (where M and N represent a natural number) according to an object 1 to be inspected is used as an element in the m-th column and a first row of tracking data. An element in the m-the column and an n-th row [where (n) represents a natural number of N or lower] of the tracking data is created according to an element in the m-th column and an n-1st row of the tracking data and according to an element in the m-th column and the n-th row of the lightness distribution data. In a flaw judgment process, individual elements of the lightness distribution data are inspected sequentially, a flaw is detected on the basis of data, for detection, which expresses a lightness difference between the lightness distribution data and the tracking data, and the quality of the object 1 to be detected is judged.
Inventors:
Yukiho Watanabe
Application Number:
JP6882594A
Publication Date:
February 28, 2000
Filing Date:
April 06, 1994
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G01B11/30; G01N21/88; G01N21/93; (IPC1-7): G01B11/30; G01N21/88
Domestic Patent References:
| JP5215695A | ||||
| JP4254746A | ||||
| JP61144550A |
Attorney, Agent or Firm:
Masatake Shiga (2 outside)
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