PURPOSE: To make it possible to form discrete ultra-fine particles, by sucking ultra-fine particle vapor formed by an evaporation method in gas into a high or ultra-high vacuum chamber so as to hold individual particles under a discrete state.

CONSTITUTION: An ultra-fine particle forming chamber 1 is evacuated while inert gas is introduced into said chamber 1 from an introducing port 5 and a metal evaporation material (a) is evaporated in this gas by heating the same by an induction heating coil 4. On the other hand, a first differential pressure chamber 7 is highly evacuated and a second differential pressure chamber 11 is evacuated to be brought to an ultra-high vacuum degree. The aforementioned metal vapor is sucked and introduced into the chamber 7 through a suction nozzle 8 so as to hold ultra-fine particles under a discrete state and subsequently introduce into the chamber 11 where adhered onto the surface of a substrate 14 and recovered. In this case, an electric insulating isolation holding material (b) (e.g., alcohol) is blown to the substrate from a nozzle 16 and ultra-fine particles are dispersed in a discrete state.