Title:
METHOD AND APPARATUS FOR MEASUREMENT IN SCANNING PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP3406236
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and an apparatus for a measurement in a scanning probe microscope, in which an initial setting operation due to the replacement of a cantilever is performed easily.
SOLUTION: While a sample 12 is being vibrated forcibly, a cantilever 3 is Z-moved coarsely. When the contact pressure with the sample 12 of the cantilever 3 becomes a prescribed magnitude, its Z-coarse motion is finished. A forcible vibration frequency may be set at a new resonance frequency or a new shift resonance frequency which is generated due to the contact of the cantilever 3 with the sample 12. Then, the cantilever 3 is X-Y-scanned, and it is brought into slight contact with the surface of the sample 12 so as to be measured. As a device which forcibly vibrates the cantilever 3, a multilayer piezoelectric vibrator which responds to an output from an oscillator which outputs a signal at a prescribed frequency can be used.
Inventors:
Geld K. Binich
Walter hebel
Akihiko Homma
Masatoshi Yasutake
Akira Inoue
Ryuichi Matsuzaki
Walter hebel
Akihiko Homma
Masatoshi Yasutake
Akira Inoue
Ryuichi Matsuzaki
Application Number:
JP2057899A
Publication Date:
May 12, 2003
Filing Date:
January 28, 1999
Export Citation:
Assignee:
Seiko Instruments Inc.
INTERNATIONAL BUSINESS MASCHINES CORPORATION
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
G01B21/30; G01N23/225; G01Q10/00; G01Q10/02; G01Q10/04; G01Q10/06; G01Q60/24; G01Q60/32; G01Q60/34; (IPC1-7): G01N13/10; G01N13/16; G12B21/20
Domestic Patent References:
| JP9196939A | ||||
| JP9281119A | ||||
| JP6180227A | ||||
| JP9281118A | ||||
| JP943258A | ||||
| JP1038900A | ||||
| JP11352135A | ||||
| JP6103177B2 |
Other References:
【文献】特許2732771(JP,B2)
【文献】特許3235786(JP,B2)
【文献】国際公開96/24026(WO,A1)
【文献】特許3235786(JP,B2)
【文献】国際公開96/24026(WO,A1)
Attorney, Agent or Firm:
Masaaki Sakaue