METHOD FOR CLEANING SURFACE OF SUPERCONDUCTOR

Japanese Patent JPH07149600

A

PURPOSE: To obtain a clean surface without deteriorating superconducting characteristics by washing the surface of an oxide superconductor containing an alkaline earth metal with pure water and then carrying out the surface purification using oxygen in cleaning the surface thereof.

CONSTITUTION: This method for cleaning the surface of a superconductor is to initially wash the surface thereof with pure water and then carry out the surface purification using oxygen in cleaning the surface of the superconductor comprising a substrate or a thin film of an oxide superconductor containing an alkaline earth metal such as YBa2Cu3Oy. A method for heating the surface of the superconductor in an atmosphere of the oxygen or performing the surface purification by irradiation of a low-kinetic energy oxygen plasma, etc., are preferred as the method for carrying out the surface purification using the oxygen. Thereby, even an alkaline earth compound-based fouling which cannot simply be removed by the method for cleaning the surface using the oxygen can readily be removed to clean the surface of the oxide superconductor while maintaining superconhducting characteristics.

WO/1996/036444

PROCESS FOR CLEANING SURFACES SOILED WITH REMAINS OF CHEWING-GUM AND DEVICE FOR CARRYING OUT THIS PROCESS

MAEDA FUMIHIKO
KIYOKURA TAKANORI
WATANABE YOSHIO
OSHIMA MASAHARU
ASANO HIDEFUMI

JP32617993A

June 13, 1995

November 29, 1993

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NIPPON TELEGRAPH & TELEPHONE

B08B7/04; C01G1/00; C30B29/22; C30B33/08; H01L21/304; H01L39/24; (IPC1-7): C30B33/08; B08B7/04; C01G1/00; C30B29/22; H01L21/304; H01L39/24

Toshio Takayama (1 person outside)

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