Title:
METHOD FOR CONTROLLING PARTIAL PRESSURE OF OXYGEN
Document Type and Number:
Japanese Patent JP3250391
Kind Code:
B2
Abstract:
PURPOSE: To improve the control accuracy of the partial pressure of oxygen by a method wherein, of the constituents of a diluent gas, at least CO2 is heated to a temp. higher than environment temperature and the diluent gas is then supplied into the environment of a predetermined temp.
CONSTITUTION: The CO2 gas G1 supplied into a first gas supply passage 24 is allowed to flow into a gas reaction chamber 23 and, after being heated to a temp. higher than the interior temp. of the furnace of a baking chamber 22 by a preheater 28, this gas is supplied into the baking chamber. On the other hand, an H2/N2 mixed gas G2 supplied into a second gas supply passage 27 is sent into the baking chamber 22 without being preheated. The CO2 gas G1 and the H2/N2 mixed gas G2 are mixed together within the baking chamber 22 heated to a baking environment temp. lower than that of the gas reaction chamber 23 by a baking heater 29 and is turned into a diluent gas G of H2-CO2-N2 constituents. The CO2 slow in dissociation reaction is preheated to a temp. higher than the environment of a predetermined temp. so as to render it into a fully dissociated state and the diluent gas is thereafter supplied into the environment of the predetermined temp., whereby the diluent gas rapidly attains chemical equilibrium to give the partial pressure of oxygen to a value close to the theoretical value.
Inventors:
Shigeru Akimoto
Hideo Ito
Hideo Ito
Application Number:
JP28310294A
Publication Date:
January 28, 2002
Filing Date:
November 17, 1994
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F23N1/02; B01J12/00; G05D21/00; (IPC1-7): B01J12/00; F23N1/02; G05D21/00
Attorney, Agent or Firm:
Kazuhide Okada