Title:
METHOD AND DEVICE FOR CLEANING WORK
Document Type and Number:
Japanese Patent JP3435137
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve such a problem that many nozzles are necessary, a cleaning device, pipe arrangement, or the like, becomes complicated and large in size or the maintenance management of the cleaning device, or the like, becomes complicated when the nozzles are arranged at respective positions for cleaning the upper and lower surfaces and side surfaces of a work individually.
SOLUTION: This method for cleaning the work comprises putting the work on a table which is used for cleaning the work from the upper and lower sides and has an opening through which water and air can pass, moving the table to a prescribed position, cleaning the work by spraying water toward at least the upper and lower surfaces and the right and left side surfaces of the work by using the nozzles, namely, cleaning all directions of the work, drying the cleaned work by using a rotary cleaning nozzle and moving the dried work from the prescribed position. In other words, all directions of the work can be cleaned almost at the same time by using many nozzles. As a result, the cleaning device, the pipe arrangement, or the like, can be simplified and miniaturized or the maintenance management of the cleaning device, or the like, can be made easy.
Inventors:
Keiji Kataoka
Application Number:
JP2000327264A
Publication Date:
August 11, 2003
Filing Date:
October 26, 2000
Export Citation:
Assignee:
Fine Machine Kataoka Co., Ltd.
International Classes:
B08B3/02; H01L21/304; (IPC1-7): B08B3/02
Domestic Patent References:
| JP3221177A | ||||
| JP60102990A | ||||
| JP4310344A | ||||
| JP938597A | ||||
| JP422081U | ||||
| JP6217384U | ||||
| JP62127743U | ||||
| JP3117724Y1 |
Attorney, Agent or Firm:
Kazunori Takenaka