To provide a method and a device for detaching a substrate with high maintainability in detaching the substrate after treated in a liquid tank, which can detach and transport the substrate with reliability by a simple mechanism.

The method and the device for detaching the substrate, which is held on a substrate holding table for treating it in the liquid tank so that a back side of the substrate contacts with the table, from the substrate holding table, includes transmitting a lowering force of a carrier device for carrying the substrate, to a means provided on the above substrate holding table for detaching the substrate, and pushing the substrate up from the above substrate holding table with the means for detaching the substrate, to detach the substrate.