Title:
METHOD AND DEVICE FOR DEVELOPING
Document Type and Number:
Japanese Patent JP3680902
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method and device for development wherein such development defect as caused by 'liquid repelling' or 'liquid running' is prevented from occurring, by supplying a developing liquid after wettability is enhanced so that the entire surface of a coat is covered with the developing liquid evenly.
SOLUTION: After a pre-wet liquid PL is supplied to a coat F which is already exposed, the pre-wet liquid PL is removed from one end side in a horizontal plane while the removed region is supplied with a developing liquid D. Thus, wettability at the coat surface is improved so that 'liquid repelling' or 'liquid running' is prevented, for even placement or the developing liquid D. Thus, development defect is prevented.
Inventors:
Kenji Sugimoto
Seiichiro Okuda
Seiichiro Okuda
Application Number:
JP399498A
Publication Date:
August 10, 2005
Filing Date:
January 12, 1998
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G03F7/30; H01L21/027; (IPC1-7): H01L21/027; G03F7/30
Domestic Patent References:
| JP7130617A |
Attorney, Agent or Firm:
Tsutomu Sugiya
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