Title:
METHOD AND DEVICE FOR LASER PROCESSING, AND WORKPIECE
Document Type and Number:
Japanese Patent JP3491545
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve productivity of viahole processing with a solid laser in an ultraviolet area by providing at least a laser means for outputting laser lights with two different wavelengths, and a laser wavelength selecting means for selecting the wavelengths.
SOLUTION: In a laser oscillator 1 whose wavelength can vary according to a driving condition such as a semi-conductive laser or a free electron laser, energy is supplied to a laser medium 8 from a laser power source 2, and the lights are oscillated between an output mirror 7 and a terminal end mirror 9, so as to pull out one part of the light from the output mirror 7. At that time, the outputted laser wavelength is decided based on the driving condition to the laser medium 8 by the laser power source 2. The outputted laser lights are induced on a processing table 5 by a bend mirror 3, condensed at a light condensing lens 4, radiated to a workpiece 6, and processed into mainly a hole or a groove. Therefore, the laser light of a long wavelength in a near-infrared area and the laser light of a short wavelength in an ultraviolet area used for a main processing and a sub processing respectively, can be obtained by one laser oscillator, without installing a high-frequency generator in an outside optical system.
Inventors:
To Saki Hidehiko
Tsutomu Yano
Tsutomu Yano
Application Number:
JP36889998A
Publication Date:
January 26, 2004
Filing Date:
December 25, 1998
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B23K26/382; B23K26/06; B23K26/064; B23K26/067; B23K26/073; H05K3/00; H05K3/46; B23K101/42; (IPC1-7): B23K26/06; B23K26/00
Domestic Patent References:
| JP1098239A | ||||
| JP6328278A | ||||
| JP10296468A | ||||
| JP63235089A | ||||
| JP8340165A | ||||
| JP6410224A | ||||
| JP7128247A | ||||
| JP9141472A |
Other References:
【文献】レーザー学会編,レーザーハンドブック,日本,株式会社オーム社,1989年12月30日,第1版第3刷,P.922
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)