Title:
METHOD AND DEVICE FOR MODIFYING SURFACE OF SOLID
Document Type and Number:
Japanese Patent JP3527969
Kind Code:
B2
Abstract:
PURPOSE: To optically modify the surface of a solid sample by making the surface of transparent glass closely adhere to the surface of the solid sample, interposing the thin film of a reaction solution between the surfaces of the solid sample and the transparent glass using a capillary phenomenon and irradiating it with light in that state.
CONSTITUTION: When a compound solution 2 is dropped onto the surface of a material to be modified (a sample) 1 and then the dropped chemical solution 2 is covered with a synthetic quartz glass plate 3 and a load is put on it, a uniform thin liquid film is formed in a gap between the material to be modified 1 and the glass plate 3 by a capillary phenomenon. When ultraviolet laser beams are made incidental to it from the vertical direction by an excimer laser device 4 through, for example, a mask 5, liquid is given photo-decomposition at the exposed part only and the surface of the material to be modified 1 is excited to cause chemical reaction between the two. In this case, particularly since the absorption of the laser beams in the compound solution is restrained because of the liquid film being thin, a lot of the ultraviolet rays reach the surface of the material to be modified 1. And since the decomposed products are all used for the surface treatment because of the liquid film being thin, the effective surface treatment is made.
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Inventors:
Murahara, Masataka
Application Number:
JP23834993A
Publication Date:
May 17, 2004
Filing Date:
September 24, 1993
Export Citation:
Assignee:
Tokai, Univ
International Classes:
A61L27/00; B01J19/12; C04B41/91; C08L27/12; C23C22/00; C23C22/73; (IPC1-7): B01J19/12; A61L27/00; C04B41/91; C23C22/00; C23C22/73
Attorney, Agent or Firm:
鈴江 武彦