Title:
METHOD AND DEVICE FOR POSITIONING PLURAL MEMBERS
Document Type and Number:
Japanese Patent JPH1165667
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To quickly position plural member, while extending detectable range by calculating a deviation value between the central coordinate value of an alignment mark and central coordinate value of a visual sensor at the position correction value of the visual sensor, correcting it, and operating the positioning of plural members. SOLUTION: A image processor 23 extracts an alignment mark from the image data of cameras 3-6, calculates a position deviation value between a face panel and a jig or a rear panel, and calculates a correction value. Also, a robot controller 24 operates the positioning control of a lower hot plate and the adherence control of an upper hot plate. Moreover, a stage controller 26 receives a command for the position control of X-Y stages 621-624 for driving the CCD cameras 3-6 from a robot controller 24 through a serial I/F 600, and transmits a command value to controllers 611-614 of the designated stages, and the position control is operated according to the command value. Thus, the position correction of the alignment mark, which should be originally detected by a visual sensor can be attained, even when this is out of a visual field.
Inventors:
KUBOTA TOMOYUKI
Application Number:
JP23004497A
Publication Date:
March 09, 1999
Filing Date:
August 26, 1997
Export Citation:
Assignee:
CANON KK
International Classes:
B23P21/00; G05D3/12; H01J9/26; (IPC1-7): G05D3/12; B23P21/00
Attorney, Agent or Firm:
Yasunori Otsuka (2 outside)
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