Title:
METHOD AND DEVICE FOR PROCESSING OF MINUTE GROOVE
Document Type and Number:
Japanese Patent JP3402632
Kind Code:
B2
Abstract:
PURPOSE: To sense the tunnel current between a probe and a base board to be processed, keep the distance constant by a probe driving mechanism, and make a track groove having a uniform width and height.
CONSTITUTION: The processing width, height, and length are stored in a CPU 127, and control device 126 gives commands to different parts. A bias is applied to a base board to be processed 111 from a power supply 112, and a probe 110 is approached to several nm's, and a tunnel current is allowed to flow. Via a current and voltage converter 117, logarithmic converter 118, gap control circuit 119, switch 120, and driver 125, the distance between the probe 110 and base board 110 is controlled. The moving amounts along the X-and Y-axis are measured by length measuring instruments 115, 116 and fed back to a relative displacement mechanism 114. The Z-direction feedback consists of an amount obtained by first turning on an analog switch 120. extracting a signal by a data D/A converter 123 of a memory 122, and adding thereto the desired amount of groove depth and the distance between the probe and base board by a voltage adding circuit. In the condition that the probe 110 is plunged a certain amount into the board 111, the relative displacement driving mechanism 114 is moved, and thereby a uniformly processed groove is generated.
Inventors:
Toshimitsu Kawase
Toshihiko Miyazaki
Akira Kuroda
Masahiro Tagawa
Toshihiko Miyazaki
Akira Kuroda
Masahiro Tagawa
Application Number:
JP28712392A
Publication Date:
May 06, 2003
Filing Date:
October 02, 1992
Export Citation:
Assignee:
Canon Inc
International Classes:
G11B9/00; B82B3/00; G01N37/00; G01Q10/04; G01Q60/10; G01Q80/00; G11B9/14; H01J37/30; (IPC1-7): H01J37/30; B82B3/00; G01N13/12; G11B9/00
Domestic Patent References:
| JP2173278A | ||||
| JP4368762A | ||||
| JP348702U |
Attorney, Agent or Firm:
Yoshio Toyota (1 outside)