Title:
METHOD AND DEVICE FOR SIMULATING TEMPERATURE CONTROL
Document Type and Number:
Japanese Patent JP2002124481
Kind Code:
A
Abstract:
To provide a temperature control simulation method/device for obtaining a developing method of a temperature control algorithm and an operating method of the temperature control without using an actual furnace, by generating a temperature system simulation model showing a response equal to the temperature change in the actual furnace on a computer in the process device of an electric furnace, a gas furnace and a vapor furnace.
A transmission function for showing the relation of temperature output against heater input is obtained, and the temperature control simulation of a heating furnace is performed with the transmission function as that which a temperature system simulation device has.
Inventors:
TANAKA KAZUO
YAMAGUCHI HIDETO
URABE KENZO
YAMAGUCHI HIDETO
URABE KENZO
Application Number:
JP2001158257A
Publication Date:
April 26, 2002
Filing Date:
August 13, 1998
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC
International Classes:
F27D19/00; G05B17/02; G06F17/13; H01L21/205; H01L21/22; (IPC1-7): H01L21/22; F27D19/00; G05B17/02; G06F17/13; H01L21/205
Attorney, Agent or Firm:
Hisako Ishido (2 outside)