PURPOSE: To provide a simulation technique capable of being variously operated corresponding to the skill of an operator and improving operability.

CONSTITUTION: This method is provided with a three-dimensional process simulator 1, a structure file 7 for simulation to be inputted to the three-dimensional process simulator 1, a translation program 4 for generating the structure file 5 from a process flow file 2, a master pattern coordinate file 3 and a measure inspection file 12 and a conversion program 6 for automatically generating the structure tile 7 for the simulation from the structure file 5. Further, it is composed of an interactive type conversion program 9 for changing the structure file 7 for the simulation by interactive input 10 and a control program 8 for performing file editing input 11 by screen displaying the structure file 7 for the simulation itself in a text form and also selecting the generation/updating method of the structure file 7 for the simulation.