METHOD AND DEVICE FOR WASHING VESSEL

Japanese Patent JP3692380

B2

PROBLEM TO BE SOLVED: To automate a solvent washing out of washing process of a vessel such as a resist can and to continuously perform an automatic washing by water to improve efficiency of the washing of the vessel.
SOLUTION: A vessel supporting device 20 is disposed on a chain of a conveyor 4 endlessly traveling in a housing 1, and while a vessel C is supported by the device 20 with an opening thereof downward, it is conveyed through a solvent washing part S, a city water washing part W1, a pure water washing part, and a drying part. The washing parts S, W1 are provided with shutters 14 which can be opened and closed. During washing by jetting, the solvent washing part S and its outside are not made to communicate with each other, and the solvent washing part S and the city water washing part W1 are not made to communicate with each other. As the solvent jetted in the solvent washing part S, a water soluble solvent or a partially water soluble solvent of ≥55°C flash point is used, taking safety into consideration.

WO/2002/048054	DEVICE AND METHOD FOR GENERATING AND APPLYING OZONATED WATER
WO/2021/112172	CLEANING AGENT, AND CLEANING METHOD AND CLEANING DEVICE USING CLEANING AGENT

Warrior Takanori
Yamamoto trillion
Takashi Takeda

JP18933998A

September 07, 2005

July 03, 1998

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az Electronic Materials Co., Ltd.

B08B3/08; B08B3/04; B08B9/30; B08B9/42; C11D3/20; C11D3/43; (IPC1-7): B08B3/08; B08B9/30; C11D3/20; C11D3/43

JP55137978U
JP4004299A
JP8245988A
JP57098206U
JP10128263A
JP6184779A
JP7238390A

Kenji Yoshitake
Hiroyuki Nagai
Junpei Okada
Hirohito Katsunuma
Kensuke Miyakoshi

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