Title:
METHOD FOR DISCHARGING SUPERCRITICAL FLUID AND APPARATUS FOR CLEANING WITH SUPERCRITICAL FLUID
Document Type and Number:
Japanese Patent JP3658117
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for discharging supercritical fluid and an apparatus for cleaning with supercritical fluid in which change in temp. by exhaust is little and tact time can be decreased.
SOLUTION: An article 8 to be cleaned is cleaned by bringing the article 8 to be cleaned into contact with a supercritical fluid in a cleaning tank 6. After cleaning, a valve 13d is opened and gas in the cleaning tank 6 is delivered into an expansion tank 5. In addition, the valve 13e is opened and a liq. gas in a gas-liq. mixed gas in the cleaning tank 6 is delivered into a separation tank 10. Then, after gaseous gas in the cleaning tank 6 is exhausted from a pressure adjusting valve 12a provided on the bottom of the cleaning tank 6 and the pressure in the cleaning tank 6 is made approximately to atmospheric pressure, a lid 7 is opened and the article 8 to be cleaned is taken out.
Inventors:
Ueno Shigeru
Application Number:
JP33180096A
Publication Date:
June 08, 2005
Filing Date:
December 12, 1996
Export Citation:
Assignee:
Sharp Corporation
International Classes:
B08B7/00; B01D11/00; H01L21/304; (IPC1-7): B08B7/00; B01D11/00; H01L21/304
Domestic Patent References:
| JP8274055A | ||||
| JP7284739A |
Attorney, Agent or Firm:
Keiichiro Saikyo
Takaya Koike
Takaya Koike