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Title:
METHOD FOR DIVIDING SEMICONDUCTOR SUBSTRATE
Document Type and Number:
Japanese Patent JP2002198326
Kind Code:
A
Abstract:

To provide a method for dividing a semiconductor substrate by which light-emitting elements, which have an excellent optical-property and reliability and can be closely arranged, are obtained.

To divide the semiconductor substrate 1, on which a plurality of light-emitting junctions 21 are scattered like a matrix in a wafer 2, into the light-emitting elements 20 of a predetermined size, a process for forming a dicing notch 6, which does not reach a depth of the light-emitting junctions 21, on a surface S2 of a side opposite to a light-emitting surface S2, a process for forming a scriber line 7 on a bottom of the dicing notch 6, and a process for cleaving the semiconductor 1 at a position of the scriber line 7 and dividing in into each of the light-emitting elements 20 are carried out.


Inventors:
NISHIMURA SUSUMU
INABA SHOJI
Application Number:
JP2000392814A
Publication Date:
July 12, 2002
Filing Date:
December 25, 2000
Export Citation:
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Assignee:
SANYO ELECTRIC CO
TOKYO SANYO ELECTRIC CO
International Classes:
H01L21/301; H01L33/08; H01L33/48; (IPC1-7): H01L21/301; H01L33/00
Attorney, Agent or Firm:
Masano Shibano