To enable a fine feature element and a ruggedness on a surface of a material to be examined to be accurately recognized by an imaging camera.
A method for examining the surface of the material includes the steps of disposing the material 12 on an optical axis 18 of the imaging camera 16, emitting spot light 24 to a region to be examined of the surface, and enlarging a difference between a brightness and a darkness of reflected lights by the ruggedness of the surface in the region to be examined or generated from the feature element 20 to be detected and the other element. Thus, the ruggedness of the surface of the material 12 or the feature element 20 is accurately detected based on the difference between the brightness and the darkness of the reflected light obtained by the camera 16.
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OZAWA GIICHI
ICHIKAWA TAKEKIYO
YAMAGUCHI AKIRA
Jun Tsuruta
Masaya Nishiyama
Higuchi Souji