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Title:
METHOD OF FEEDING GRINDING LIQUID FOR USE IN SINGLE-SURFACE GRINDING OF GLASS SUBSTRATE, AND SINGLE-SURFACE GRINDING DEVICE
Document Type and Number:
Japanese Patent JP2004276133
Kind Code:
A
Abstract:

To suppress occurrence of grinding unevenness (surface unevenness) on a peripheral portion of a glass substrate after grinding, due to insufficient feeding of a grinding liquid to a peripheral portion of a grinder.

There is provided a method of feeding the grinding liquid for use in single-surface grinding of the glass substrate G, according to which the glass substrate G is sucked and held by a suction pad 6 formed of a porous soft resin sheet, which is stuck to a surface of a pressing disk 1 rotatable about a swinging rotation shaft 8, and then the glass substrate G is pressed onto a grinding cloth 9 laid on the rotating grinder 2 by the pressing disk 1, followed by grinding the glass substrate G while feeding the grinding liquid in the form of slurry containing water and grinding grains dispersed therein. According to the method, the grinding liquid is fed from a feeding port at the center of the grinder, and from at least one or more liquid feeding nozzles 4 arranged along a peripheral edge of the pressing disk and rocked together with the pressing disk 1.


Inventors:
MARUYAMA MASAKAZU
Application Number:
JP2003067230A
Publication Date:
October 07, 2004
Filing Date:
March 12, 2003
Export Citation:
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Assignee:
CENTRAL GLASS CO LTD
International Classes:
B24B57/02; B24B37/00; (IPC1-7): B24B37/00; B24B57/02
Attorney, Agent or Firm:
Yoshiyuki Nishi