Title:
METHOD FOR GENERATING ACTIVATED CHEMICAL SPECIES
Document Type and Number:
Japanese Patent JP2006224038
Kind Code:
A
Abstract:
To provide a method for generating chemical species for removing the chemical species occluded in a solid material to the surface of a solid and in gas, its generation apparatus, and a reactor for the chemical species.
In the method for generating the chemical species for removing the chemical species occluded in the solid material to the surface of the solid and in the gas, the method for generating the chemical species, its generation apparatus, and the reactor irradiate the solid material with a microwave. Thus, electric field application means and heating means can be made simple, and the chemical species present in the solid can simply be generated on the surface of the solid and in the gas.
Inventors:
NISHIOKA MASATERU
MIZUKAMI FUJIO
KAWASAKI TAKU
MIZUKAMI FUJIO
KAWASAKI TAKU
Application Number:
JP2005043282A
Publication Date:
August 31, 2006
Filing Date:
February 18, 2005
Export Citation:
Assignee:
NAT INST OF ADV IND & TECHNOL
DENKI KAGAKU KOGYO KK
DENKI KAGAKU KOGYO KK
International Classes:
B01J19/12; H01L21/3065
Domestic Patent References:
| JP3337473B2 | 2002-10-21 | |||
| JP2002346338A | 2002-12-03 | |||
| JP2004075431A | 2004-03-11 | |||
| JP2004311071A | 2004-11-04 | |||
| JP2004169665A | 2004-06-17 |
Attorney, Agent or Firm:
Masahiko Sudo