Title:
METHOD OF INHIBITING MOLECULAR ION OF SECONDARY ION MASS SPECTRUM OF SILID SUBSTANCE
Document Type and Number:
Japanese Patent JPS60198440
Kind Code:
A
Abstract:
A method of suppressing molecular ions in the secondary ion mass spectra of conducting, semiconducting and insulating specimens is described using a commercial secondary ion microscope/mass analyzer with unconventional primary beam conditions and uncoated samples, so as to almost eliminate the contribution of molecular ions to the mass spectrum. This results in excellent discrimination for major and trace element detection in these materials, including for example complete resolution of the rare earth elements in a number of minerals. Complete elemental analysis for a much enhanced range of elements down to the ppb level is now possible. The method also facilitates the analysis of insulating materials which would undergo surface charging distortion under any other condition.
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Inventors:
JIYOOJI MAIKURU BANKUROFUTO
UIRIAMU JIYOSEFU SHIYAUBIN
NOOMAN SUCHIYUWAATO MATSUKUINT
JIEEMUSU BAANAADO METSUTOSON
UIRIAMU JIYOSEFU SHIYAUBIN
NOOMAN SUCHIYUWAATO MATSUKUINT
JIEEMUSU BAANAADO METSUTOSON
Application Number:
JP22563784A
Publication Date:
October 07, 1985
Filing Date:
October 26, 1984
Export Citation:
Assignee:
JIYOOJI MAIKURU BANKUROFUTO
UIRIAMU JIYOSEFU SHIYAUBIN
NOOMAN SUCHIYUWAATO MATSUKUINT
JIEEMUSU BAANAADO METSUTOSON
UIRIAMU JIYOSEFU SHIYAUBIN
NOOMAN SUCHIYUWAATO MATSUKUINT
JIEEMUSU BAANAADO METSUTOSON
International Classes:
G01N23/225; H01J37/252; H01J49/14; H01J49/44; (IPC1-7): G01N23/225; H01J37/252; H01J49/44
Attorney, Agent or Firm:
Hideto Asamura
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