Title:
METHOD FOR INSPECTING SUBSTRATE FOR IMPRINT, METHOD FOR PRODUCING SUBSTRATE FOR IMPRINT, IMPRINT METHOD AND IMPRINT SYSTEM
Document Type and Number:
Japanese Patent JP2015077758
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method, and the like, for inspecting a substrate for imprint capable of inspecting the conditions of a mold or a transfer substrate before or immediately before the practicing of imprint.SOLUTION: The displacement magnitude of the surface when external force is not applied to a substrate 25 having a flexible region X, further, the displacement magnitude of the surface when external force is applied thereto is measured, the displacement magnitudes are compared, and based on the compared result, the conditions of the substrate 25 are decided.
Inventors:
HIRAKA TAKAAKI
ARITSUKA YUKI
ARITSUKA YUKI
Application Number:
JP2013217543A
Publication Date:
April 23, 2015
Filing Date:
October 18, 2013
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
B29C59/02; H01L21/027
Domestic Patent References:
| JP2012099790A | 2012-05-24 | |||
| JP2011245787A | 2011-12-08 | |||
| JP2011245816A | 2011-12-08 |
Attorney, Agent or Firm:
Patent Business Corporation Intect International Patent Office
Yasuo Ishikawa
Kazuyuki Oku
Yasuo Ishikawa
Kazuyuki Oku